Fascination About Noohapou
Fascination About Noohapou
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Remote spots: Static models are usually positioned remotely, escalating Price and reducing In general program efficiency.
Device & TCU program calibration techniques fluctuate exterior test products not utilised frequently for verifying
The information beneath is categorized by semiconductor course of action and Instrument manufacturer. Each individual desk contains an programs Matrix that reveals qulified and business processes.
Originally Started in 1985, our company has grown into a acknowledged leader in offering temperature control devices to the worldwide semiconductor field.
This impressive program, offering a small variety component, low price-of-possession and Dynamic Temperature Handle available course of action and tools engineers a brand new tool to improve their temperature delicate processes.
The precision of your POU 3300 allows for impartial Charge of the procedure fluid temperature on the wafer chuck inside of +/- 0.one °C of set stage, and the speedy reaction time of your program enables for maximum wafer-to-wafer repeatability all through the etch process.
All static TCUs demand excess cooling & heating capacities because of their very large approach fluid reservoirs. the procedure fuid reservoir on LAUDA-Noah's dynamic temperature Management program is fewer than one gallon.
With our device strategically mounted somewhere around 6 toes through the chamber, we realize a much more precise examining of the chuck temperature. This tactic makes sure reliable temperature all over the generation large amount, resulting in improved wafer-to-wafer CD uniformity.
big Footprint: Static units occupy important House in the fabrication tool location, decreasing its effectiveness.
LAUDA-Noah is meeting these new problems and it has included Strength saving technological innovation in programs which have been welcoming towards the natural environment and also have a inexpensive to operate.
The TEs' can swap directly from heating to cooling, or website visa-versa. they are able to activate & off although from the heating or cooling manner and may maximize or decrease the amount of heating or cooling without having switching in any way.
The POU3300 method presents dynamic temperature Charge of the procedure chamber cathode / electrode / anode and may be synchronized with any etch method.
the truth is always that genuine Dynamic Temperature Regulate can only be achieved when all five (five) of the subsequent technique style and installation needs are fulfilled:
(Therefore, setting up a static unit next to chamber will likely not enable it to offer dynamic temperature Management)
We call for a lot less cooling/heating capacity for a similar software to be a static TCU on account of our smaller reservoir quantity.
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